The art of what’s possible in semiconductor: Narrowing the variable list in design of experiments (DOE)
Is it possible to optimize a plasma-enhanced chemical vapor deposition (PECVD) with just 25 test wafers? Absolutely! In semiconductor manufacturing, constraints such as a 25-wafer run on a tool are common, but they don’t have to limit success. Leveraging process data to inform experiment design is a winning strategy for getting effective results with limited resources.